1Emergency Back-Up
2By-Pass Module
33 Way Auto-Valve
1Touch Screen : Push P.M Mode
2N2 Purge : 10min Over
(Eliminate remalining Toxic gases)
3Close the Manual Valve
4Unlock the Clamp
5Take Out the Main Module
66Replace with a prepared
(Include adsorbent in the Main Module)
7Prevent Powder and Corrosion
All Safety Devices must be met to operate.
There are safety devices to prevent Gas Leakage, Fire and Explosion.
Process | Gas |
---|---|
IMP | PH3,ASH3,BF3 |
Diffusion | HF,Cl2,NH3..(Acid, Alkali) |
Content | Description |
---|---|
Model | TCKOA-S2 |
Treatment type | Adsorbent |
Application | IMP, Chemical (Acid, Alkali) |
Capacity | ~200LPM (Customize) |
Operation type | Automatic (PLC base TOUCH screen) |
Dimension (W×D×H, mm) | Scrubber 800×800×1,610 |
Weight (kg) | 600 kg |
Power | 1-Phase, 208Vac., 50/60Hz Max. consumption Power / 800 |
Content | Description | ||
---|---|---|---|
Specification | Connection | ||
Inlet | 2~4 Port | NW50 KF | |
N2 | 5~10 LPM (4~5kg/cm2) | 3/8", Swagelok | |
Exhaust | Capacity | -40 ~ -80mmH2O | NW 100 MF Flange |
Capacity | -40 ~ -80mmH2O | NW 100 MF Flange |