2023
Plasma Scrubber Installed VISHAY TAIPEI
Large Capacity Plasma Scrubber Volume Order
from HONGJUN Solar Fabs
Plasma Scrubber Installed Global Foundries Singapore
2022
Large Capacity Plasma Scrubber Volume Order from
Ouhao/huasheng Solar Fabs
Plasma Scrubber Installed SSMC Singapore
2020
Volume Turn-Key order from Silan 12” Fab
Volume Order from SMIC 12”/8” Fabs
2018
China-Localization Programs with Success
Open a new Join Venture with China Big Fund
2017
Denox Volume installed Bases at Semi.Fabs.
2016
Plasma Scrubber and Thermal-wet Scrubber Volume
installed Bases
2015
Plasma Scrubber Volume installed Bases
at SMIC 12”/8” Fabs
2014
Plasma Scrubber Installed SMIC Beijing
2013
Microwave Plasma Installed Samsung (Korea, China)
SK Hynix (Korea, China)
2009
Establishment of branch company in china
(with manufacturing Facility)
2006
Establishment of the mother company in Korea
(and Plasma Application R&D)