HOME Products Thermal Wet Scrubber

Heat Wet Scrubber

Heat Wet Scrubber

Home Products Thermal Wet Scrubber

Product Overview

  • 1Main Chamber

    • Self Heater Cleaning System
    • Protect Heater from Toxic Gases
    • Powder Free
    • Sufficient for Treatment Time

  • 2Cooling Unit

    • Dual Cooling System
    • Prevent Powder and Corrosion

  • 3Wet Tank

    • Easy Check
    • Easy PM
    • Easy to remove Powder

  • 4Wet Tower

    • Fully cool down gas before Exhaust
    • High performance Wet Tower

Advantage

  • 1High Efficiency

  • 2Thermal Control Technology

  • 3Safety Operation

  • 4Self Heater Cleaning System

  • 5Easily Maintanance(Tilting Chamber)

  • 6Prevent Powder and Corrosion

Application

Process Gas
CVD/PVD SiH4, NF3, WF6, B2H6, TEOS, TDMAT, C3H6, Etc.
Diffusion SiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.

Specification

Content Description
Model TCKTW-S6 (Single Type)
Treatment type Heater+ Wet
Application Diffusion, CVD, PVD Process
Capacity 600LPM(Max)
Operation type Automatic (PLC base TOUCH screen)
Dimension (W×D×H, mm) Scrubber 800*985*1600
Weight (kg) 600 kg
Power 3-Phase, 208Vac., 50/60㎐
Main Circuit Breaker / 75A
Max. Power Consumption / 15kW
Normal operating(Avg.) / 4kW

Utility

Content Description
Specification Connection
Inlet 2~6 Port NW40 KF FLANGE
N2 4~5 kg/cm2 3/8", Swagelok
CDA 4~5 kg/cm2 3/8", Swagelok
PCW 4~5 kg/cm2 3/8", Swagelok or NPT
City Water 1~3 kg/cm2 3/8", Swagelok or NPT
Drain Pumping Drain 3/4” PT Female PVC
Exhaust Gas Exhaust -40 ~ -80mmH2O ISO 100 MF Flange
Thermal Exhaust -40 ~ -80mmH2O ISO 100 MF Flange
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