Technology
Plasma Wet Scrubber
Plasma Wet Scrubber
Product Overview

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1Plasma Generation & Reaction Module
- • Generate DC thermal palsma with N2
- • Decompose waste gas by pyroltsis process
- • Spray water to avoid recombination of the waste gas
- • Ceramic tube for high resistance to corrosion
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2Quenching Section
- • Rapid cooling to avoid NOx
- • Spray water to remove by-product such as powder and water soluble gas
- • Teflon coated for high resistance to corrosion
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3Reservoir
- • Store the waste water with high capacity
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4Wet Jacket
- • Water spray with packing materials to remove by-product such as powder and water soluble gas
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Option : Electric chiller
- • Dust removal Good
- • Remarkably improved Moisture removal effect
- • High HF removal rate
- • Improved the Hardware stability and safety
Advantage
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1Thermal Plasma Technology System
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2Automatic Safety & Energy Saving Mode
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3Temp. 2,000℃ Over : High Performance
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4Semi, LCD, LED, Solar : Optimize All Processes
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5Corrosion and Powder Management Technology
Application
Process | Gas |
---|---|
CVD | SiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc. |
Diffusion | SiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc. |
Etch | CF4, SF6, BCl3, Cl2, HBr, Etc. |
Solar-cell | SiH4, NH3,TMA, Etc. |
Specification

Content | Description |
---|---|
Model | A209-H, A209, A209WH |
Treatment type | Plasma + Wet |
Application | CVD Diffusion Etch |
Capacity | 600LPM(Max) |
Operation type | Automatic (PLC base TOUCH screen) |
Dimension (W×D×H, mm) | Scrubber 900×900×1,850 |
Weight (kg) | 550 kg |
Power | 3-Phase, 208Vac., 50/60Hz Main Circuit Breaker / 100 A Max. Power Consumption / 18 kW |
Utility
Content | Description | ||
---|---|---|---|
Specification | Connection | ||
Inlet | 2~6 Port | NW40 KF FLANGE | |
N2 | 20~150 LPM (4~5kg/㎠) | 1/2", Swagelok | |
CDA | 30~200 LPM (4~5kg/㎠) | 1/2", Swagelok | |
PCW | 20~50 LPM (4~5 kg/㎠) | 3/4", Swagelok | |
City Water | 5~10 LPM (3~5 kg/㎠) | 3/4", Swagelok | |
Drain | Pumping Drain | 3/4" PT Female PVC | |
Exhaust | Gas Exhaust | -40 ~ -80mmH2O | ISO 100 FLANGE |
Thermal Exhaust | -40 ~ -80mmH2O | ISO 100 FLANGE |
