Technology

Plasma Wet Scrubber

Plasma Wet Scrubber

Home Technology Products Plasma Wet Scrubber

Product Overview

  • 1Plasma Generation & Reaction Module

    • • Generate DC thermal palsma with N2
    • • Decompose waste gas by pyroltsis process
    • • Spray water to avoid recombination of the waste gas
    • • Ceramic tube for high resistance to corrosion

  • 2Quenching Section

    • • Rapid cooling to avoid NOx
    • • Spray water to remove by-product such as powder and water soluble gas
    • • Teflon coated for high resistance to corrosion

  • 3Reservoir

    • • Store the waste water with high capacity

  • 4Wet Jacket

    • • Water spray with packing materials to remove by-product such as powder and water soluble gas

  • Option : Electric chiller

    • • Dust removal Good
    • • Remarkably improved Moisture removal effect
    • • High HF removal rate
    • • Improved the Hardware stability and safety

Advantage

  • 1Thermal Plasma Technology System

  • 2Automatic Safety & Energy Saving Mode

  • 3Temp. 2,000℃ Over : High Performance

  • 4Semi, LCD, LED, Solar : Optimize All Processes

  • 5Corrosion and Powder Management Technology

Application

Process Gas
CVD SiH4, NF3, WF6, B2H6, TEOS, TDMAT, N2O, C3H6, Etc.
Diffusion SiH4, TEOS, DCS, NH3, ClF3, B2H6, Etc.
Etch CF4, SF6, BCl3, Cl2, HBr, Etc.
Solar-cell SiH4, NH3,TMA, Etc.

Specification

Content Description
Model A209-H, A209, A209WH
Treatment type Plasma + Wet
Application CVD Diffusion Etch
Capacity 600LPM(Max)
Operation type Automatic (PLC base TOUCH screen)
Dimension (W×D×H, mm) Scrubber 900×900×1,850
Weight (kg) 550 kg
Power 3-Phase, 208Vac., 50/60Hz
Main Circuit Breaker / 100 A
Max. Power Consumption / 18 kW

Utility

Content Description
Specification Connection
Inlet 2~6 Port NW40 KF FLANGE
N2 20~150 LPM (4~5kg/㎠) 1/2", Swagelok
CDA 30~200 LPM (4~5kg/㎠) 1/2", Swagelok
PCW 20~50 LPM (4~5 kg/㎠) 3/4", Swagelok
City Water 5~10 LPM (3~5 kg/㎠) 3/4", Swagelok
Drain Pumping Drain 3/4" PT Female PVC
Exhaust Gas Exhaust -40 ~ -80mmH2O ISO 100 FLANGE
Thermal Exhaust -40 ~ -80mmH2O ISO 100 FLANGE
  BENCHMARKS  
Loading Time: Base Classes  0.0039
Controller Execution Time ( Document / Remap )  0.0295
Total Execution Time  0.0346
  GET DATA  
GET 데이터가 존재하지 않습니다
  MEMORY USAGE  
3,780,320 bytes
  POST DATA  
POST 데이터가 존재하지 않습니다
  URI STRING  
document/c001
  CLASS/METHOD  
document/index
  DATABASE:  triplecores (Document:$db)   QUERIES: 8 (0.0096 초)  (Hide)
0.0002   SELECT *
FROM `cb_document`
WHERE `doc_key` = 'c001'
 LIMIT 1 
0.0004   UPDATE `cb_document` SET doc_hit = doc_hit+1
WHERE `doc_id` = '29' 
0.0003  
            SELECT IF(m.men_parent <> 0,
                (
                SELECT IF(m2.men_parent <> 0,
                    (
                    SELECT CONCAT(m3.men_id,'^^',m3.men_name,'^^',m3.men_link,'>>>',m2.men_id,'^^',m2.men_name,'^^',m2.men_link,'>>>',m.men_id,'^^',m.men_name,'^^',m.men_link)
                    FROM cb_menu m3
                    WHERE m3.men_id = m2.men_parent
                    ),
                    CONCAT(m2.men_id,'^^',m2.men_name,'^^',m2.men_link,'>>>',m.men_id,'^^',m.men_name,'^^',m.men_link))
                FROM cb_menu m2
                WHERE m2.men_id = m.men_parent), CONCAT(m.men_id,'^^',m.men_name,'^^',m.men_link)
                ) as cate_list

            FROM cb_menu m 
            WHERE m.men_link = 'http://www.triplecores.com/document/c001' or m.men_link = 'http://www.triplecores.com/document/c001' or m.men_link = '/document/c001' or m.men_link = '/document/c001?'
            ORDER BY men_parent 
            DESC LIMIT 1;
         
0.0005   REPLACE INTO `cb_currentvisitor` (`cur_ip`, `mem_id`, `cur_mem_name`, `cur_datetime`, `cur_page`, `cur_url`, `cur_referer`, `cur_useragent`) VALUES ('3.227.251.94', 0, '', '2023-06-07 20:52:15', 'Plasma Wet Scrubber - Triple Cores Technology', 'http://www.triplecores.com/document/c001', '', 'CCBot/2.0 (https://commoncrawl.org/faq/)') 
0.0074   SELECT count(*) as rownum
FROM `cb_currentvisitor`
LEFT JOIN `cb_member` ON `cb_currentvisitor`.`mem_id` = `cb_member`.`mem_id`
WHERE `cur_datetime` > '2023-06-07 20:42:15'
AND   (
`cb_member`.`mem_is_admin` = 0
OR `cb_member`.`mem_is_admin` IS NULL
 ) 
0.0001   SELECT *
FROM `cb_menu`
WHERE men_link not like  '%_cn'
AND `men_desktop` = 1
ORDER BY `men_order` ASC 
0.0004   INSERT INTO `cb_stat_count` (`sco_ip`, `sco_date`, `sco_time`, `sco_referer`, `sco_current`, `sco_agent`) VALUES ('3.227.251.94', '2023-06-07', '20:52:15', '', 'http://www.triplecores.com/document/c001', 'CCBot/2.0 (https://commoncrawl.org/faq/)') 
0.0003   INSERT INTO cb_stat_count_date (scd_date, scd_count) VALUES ('2023-06-07', 1)  ON DUPLICATE KEY UPDATE scd_count= scd_count + 1  
  HTTP HEADERS  (Show)
  SESSION DATA  (Show)
  CONFIG VARIABLES  (Show)